Inventory

Army Research Laoratory Adelphi
Micrion 9500	50kV H2O etch W dep 8” wafer Little automation Ex situ liftout
Contact	Mark Wood, Matt Ervin
Access	Collaborators and Gov’t organizations, US citizens only
Applications	semiconductor device + material characterization and failure analysis SEM cross-section and TEM sample prep Device modification of MEMS and electro-optic devices

Army Research Laoratory Aberdeen
TBD	50kV H2O etch W dep 8” wafer Little automation Ex situ liftout
Contact	Brian Schuster
Access	Collaborators and Gov’t organizations, US citizens only
Applications	semiconductor device + material characterization and failure analysis SEM cross-section and TEM sample prep Device modification of MEMS and electro-optic devices

Johns Hopkins University MRSEC Facility
FEI Nova 600 NanoLab	HW: Magnum ion column (5-7 nm resolution, 5-30 kV) FEG SEM Detectors: ETD, TLD GIS: Pt, TEOS OmniProbe (Analog system) SW: AutoSlice&View AutoTEM AutoFIB NPGS lithography (available in August 08)
Contact	Prof. C. L. Chien, clc@pha.jhu.edu Dr. Frank Zhu, qzhu@pha.jhu.edu
Access	Outside users can access through collaboration with MESEC PI/students ($70/hr) Non-collaboration users can access it after approval ($210/hr)
Applications	TEM Sample Prep Nano-electronics and nano-biomaterial characterization Nano stencil mask fabrication

Micron
Hitachi FB-2000A	Swapable side entry stage E.J.Fjeld S-4700 stage
FEI FIB200	magnum ion column
FEI V600
FEI Quanta 200 3D	DualBeam with Xtreme Access systems
FEI Strata 235	DualBeam with AutoProbe200, Sirion column upgrade
FEI Strata 237	DualBeam with flipstage, LV-STEM, EDAX EDS
FEI Strata 400	DualBeam GIS: IEE, EE, Pt, C, SCE, DE, TEOS
Contact	David MacMahon, dmacmaho@micron.com
Access	Internal Use Only
Applications	Passive voltage contrast on NAND Flash Failure Analysis and TEM Sample Prep

National Institutes of Health National Cancer Institute, Laboratory of Cell Biology
FEI Nova NanoLab 200	HW: Magnum ion column FEG SEM Detectors: ETD, TLD GIS: Pt Cryo system SW: AutoSlice&View
Contact	Sriram Subramaniam, subramas@mail.nih.gov
Access	Internal Use Only
Applications	Primarily for biological applications

National Institutes of Health National Cancer Institute Frederick
TBD
Contact
Access	Internal Use Only
Applications	Biological applications Nano characterization

National Institute of Standards and Technology Center for Nanoscale Scinece and Technology (CNST)
Zeiss NVision 40 CrossBeam	HW: Seiko Zeta FIB (4 nm resolution at 0.1 pA) Gemini FEG SEM (2.5 nm resolution at 1 KV) STEM detector Deposition: Pt, C, SiO2 Etching: H2O, XeF2 Omniprobe liftout tool 4 inch load lock SEM imaging while FIB milling (high current mode/high depth of field) No magnetic field projected outside SEM column SW: Raith lithography system
Contact	Mike Hernandez, michael.hernandez@nist.gov Alex Liddle, Liddle@nist.gov
Access	Collaborators & User Facility
Applications	Cross-sectional imaging TEM sample prep Micro/nanomachining Nanophotonic structure fabrication

National Institute of Standards and Technology Chemical Science and Technology Laboratory (CSTL)
FEI Nova 600 NanoLab	HW: Sidewinder ion column (2 KV – 30 KV, 21 nA) FEG SEM Detectors: ETD, TLD, CDEM, STEM GIS: Pt, C, SCE Autoprobe 200 Klinediek Micromanipulator Oxford Incax-sight EDS system Quorum Polaron Cryo system SW: AutoSlice&View AutoTEM
Contact	Babak Nikoobakht (babak.nikoobakht@nist.gov)
Access	Collaborators
Applications	Biological room temp and cryogenic 3D imaging and analysis Microanalysis Nanowire research Particle analysis Materials science and geology TEM sample prep

National Institute of Standards and Technology Manufacturing Engineering Laboratory (MEL)
FEI Helios 600 NanoLab	HW: Sidewinder ion column (4 nm resolution at 1 pA) Helios FEG SEM (better than 1 nm resolution) Detectors: ETD, TLD, STEM, STEM II GIS: Pt Bruker XFlash SDD system Quorum Polaron Cryo system Laser interferometer stage drift and vibration compensation 38 pm resolution SW:
Contact	Andras Vladar (andras.vladar@nist.gov)
Access	Collaborators
Applications	Metrology

Naval Research Laoratory Materials Science and Technology Division
FEI Nova 600 NanoLab	HW: Magnum ion column Detectors: ETD, TLD, Removable STEM GIS: Pt, Selective Carbon Etch, Enhanced Etch, Carbon Dep Oxford Incax EDS system HKL EBSD/Forward Scatter Diode Detectors (ECCI) Raith E-beam/I-beam writer (Nanolithography tool) Ascend Micromanipulator SW: HKL Suite Auto Slice and View Auto TEM
Contact	Rhonda Stroud, 202-404-4143 Nabil Bassim Konrad Bussmann
Access	Collaborators
Applications	EBSD Mapping/Reconstruction TEM sample preparation Nanowire research Patterning/Device design Defect analysis ECCI imaging of dislocations/crystal defects

University of Maryland Institute for Reseach in Electronics and Applied Physics
Micrion FIB-2500	Ion column (50 kV, 5nm)
FEI 620 DualBeam	Ion column (30 kV)
FAI NanoFab-150	150 kV linear accelerating column (~100nm) Arsenic-Palladium-Boron source
Contact
Access
Applications