Inventory

Army Research Laoratory
Aberdeen
FEI Nova NanoLab 600 HW:
Sidewinder ion column (2 KV – 30 KV, 21 nA)
Sirion FEG SEM
Detectors: ETD, TLD, CDEM
GIS: Pt
Autoprobe 200

SW:
Auto Slice&View
AutoTEM
AutoFIB

Analytical Tools:
Oxford Si-Li EDS
Oxford/ HKL EBSD

Contact Brian Schuster
Access Collaborators and Gov’t organizations, US citizens only
Applications semiconductor device + material characterization and failure analysis
SEM cross-section and TEM sample prep
Device modification of MEMS and electro-optic devices
Brookhaven National Laboratory
Center for Functional Nanomaterials
FEI Helios NanoLab 600 HW:
DualBeam (SEM/FIB)
Detectors: ETD, TLD, STEM
GIS: Pt, TEOS
Omniprobe
Evactron in-situ plasma cleaning

SW:
Nanometer Pattern Generator System (NPGS, http://www.jcnabity.com/)
LabVIEW (for in-situ electrical measurements)
Oxford Instruments INCA for microanalysis

Analytical Tools:
Oxford Instruments SiLi EDS Detector

Contact Fernando Camino, fcamino-at-bnl.gov
Website http://www.bnl.gov/cfn/groups/Nanofabrication/
Access User facility (academic and industrial users welcomed)
Applications SEM imaging while FIB milling, SEM cross-section and TEM sample preparation, Micro/nanofabrication, E-beam and ion beam lithography, In-situ electrical measurements, Electron beam induced current imaging, Microanalysis
Carnegie Institution of Washington
Geophysical Laboratory
Zeiss Auriga CrossBeam HW:
Cobra FIB (Gemini FEG SEM (1.9 nm resolution at 1 kV)
Detectors: SE2(ETD), in-lens, ESB, STEM
Multi-GIS: Pt, C, H2O, XeF2, SiO2
Charge Compensator
Autoprobe 200.2

SW:
Zeiss SmartSEM
Avizo 3D

Analytical Tools:
Oxford INCA X-sight SDD (80mm2)

Contact Yingwei Fei, fei-at-gl.ciw.edu
Access Collaborators
Applications Primarily for applications in high-pressure research, earth and planetary sciences
College of Staten Island, City University of New York
Nanotechnology Research Laboratory
Micrion 2500 HW:
Ion column (Ga LMIS, 50kV, 1pA - 45nA)
Detectors: MCP, SE/SI
Etching Gases: H2O, Os, XeF2
Deposition: W(CO)6, TMCTS

Contact Valery Ray, vray-at-partbeamsystech.com
Access Open to outside users, industrial and academic
Applications Nanomachining, Cross-Sectioning, Diamond Micromachining, Gas-Assisted Etching and Deposition, Custom Aperture Machining
Drexel University
Centralized Research Facility
FEI DB235 HW:
Sirion FEG SEM
Detectors: SED, TLD, CDEM
GIS: Pt
Autoprobe 100

SW:
FEI Auto Applications

Analytical Tools:
iXRF, EDS, XRF

Contact Craig Johnson, cljohnson-at-coe.drexel.edu
Website http://crf.coe.drexel.edu/
Access Outside academic and industrial users welcome
Applications characterization, fabrication, TEM sample prep
George Washington University
GW Nanofabrication and Imaging Center
FEI Helios NanoLab 660 DualBeam FIB SEM HW:
Elstar electron column
Tomahawk ion column
Detectors: TLD (SE and BSED), SED, ICD, Mirror
Integrated plasma cleaner
STEM
GIS: Insulator Dep, Insulator Etch, W, Pt

SW:
AutoSlice&View
MAPS
NanoBuilder
iFast Developers Kit

Analytical Tools:
EasyLift Nanomanipulator
EDAX Octane Pro with Team Basic

Contact Chris Brantner, chrisbrantner-at-email.gwu.edu
Access Located in the Nanofabrication and Imaging Center. Fee for Service/Usage with current prices available upon request. Open to internal and external academic and industry users.
Applications SEM imaging while FIB milling, SEM cross-section, TEM sample preparation, Microanalysis, Materials research, Biological 3D image reconstruction, Characterization
Johns Hopkins University
MRSEC Facility
FEI Nova 600 NanoLab
HW:
Magnum ion column (5-7 nm resolution, 5-30 kV)
FEG SEM
Detectors: ETD, TLD, CDEM
GIS: Pt, TEOS
OmniProbe (Analog system)


SW:
AutoSlice&View
AutoTEM
AutoFIB
NPGS lithography (installed and tested, in optimizing)

Contact Prof. C. L. Chien, clc-at-pha.jhu.edu
Dr. Sunxiang Huang, sxhuang-at-pha.jhu.edu
Access Outside users can access through collaboration with MESEC PI/students ($70/hr)
Non-collaboration users can access it after approval ($210/hr)
Applications TEM Sample Prep
Nano-electronics and nano-biomaterial characterization
Nano stencil mask fabrication
Lehigh University
Center for Advanced Materials and Nanotechnology (CAMN)
FEI Scios
FIB SEM
HW:
Tomahawk ion column (2 kV - 30 kV, 65 nA)
Nicole FEG SEM
Detectors:
ETD, TLD (T1 & T2), SE/ICE
GIS: Pt
FEI EasyLift
Integrated plasma cleaner

SW:
Auto Slice and View G3
Auto TEM G2
FEI Movie Creator
Drift Correction

Contact Gene Lucadamo, eal7-at-lehigh.edu
Access User Facility
Applications Cross-sectional imaging
TEM sample prep
Micro/nanomachining
National Institutes of Health
National Cancer Institute, Laboratory of Cell Biology
Zeiss NVision 40
CrossBeam
HW:
Seiko Zeta FIB (4 nm resolution at 0.1 pA)
Gemini FEG SEM (2.5 nm resolution at 1 KV)
Detectors:
SE2 (ETD), in-lens, ESB, STEM
GIS: Pt, C

SW:
Zeiss SmartSEM
ATLAS 3D

Contact Sriram Subramaniam, subramas-at-mail.nih.gov
Access Internal Use Only
Applications Primarily for biological applications
National Institutes of Health
NIAID IRF -Frederick
TBD  
Contact  
Access Internal Use Only
Applications Biological applications
Nano characterization
National Institute of Standards and Technology
Center for Nanoscale Science and Technology (CNST)
FEI Helios 650 NanoLab

HW:
Tomahawk ion column (2 kV - 30 KV, 65 nA)
Elstar FEG SEM
Detectors: ETD, TLD, SE/ICE, STEM
Deposition: Pt, C, SiO2(TEOS)
Etching: H2O, XeF2
Omniprobe Autoprobe liftout tool
Integrated plasma cleaner

SW:
Amira
Avizo Fire
AutoFIB (macro recorder)
AutoProbe (Omniprobe)
Auto Slice and View G3
Drift Correction
AutoTEM G2
FEI Movie Creator
Aztec (Oxford simultaneous EDS & EBSD)
EBS3 (3D acquisition of EBSD maps)
Nano Builder

Analytical Tools:
Oxford X-Max80 SDD EDS
Oxford NordlysMax2 EBSD

 

Contact Vince Luciani, vince.luciani-at-nist.gov
Access User Facility
Applications Cross-sectional imaging
TEM sample prep
Micro/nanomachining
Compositional analysis/mapping
3D tomography
National Institute of Standards and Technology
Center for Nanoscale Science and Technology (CNST)
FEI Helios 650 NanoLab HW:
Tomahawk ion column (2 kV - 30 KV, 65 nA)
Elstar FEG SEM
Detectors: ETD, TLD, SE/ICE, STEM
Deposition: Pt, W, Au, C, SiO2
Etching: H2O, XeF2
Omniprobe Autoprobe liftout tool
Integrated plasma cleaner

SW:
Amira
Avizo Fire
AutoFIB (macro recorder)
AutoProbe (Omniprobe)
Auto Slice and View G3
AutoTEM G2
Drift Correction
FEI Movie Creator
Kleindiek iProbe
Nano Builder
iFast

Analytical Tool:
Kleindiek Micromanipulator (x4) with Ro Tip, MicroTweezers, and dedicated electrical feedthrough for low noise measurements

Contact Vince Luciani, vince.luciani-at-nist.gov
Access User Facility
Applications Micro/nanomachining
In-situ electrical measurement
TEM sample prep
Circuit editing
Nanophotonic structure fabrication
National Institute of Standards and Technology
Center for Nanoscale Science and Technology (CNST)
Zeiss NVision 40 CrossBeam HW:
Seiko Zeta FIB (4 nm resolution at 0.1 pA)
Gemini FEG SEM (2.5 nm resolution at 1 KV)
STEM detector
Deposition: Pt, C, SiO2
Etching: H2O, XeF2
Omniprobe Autoprobe liftout tool
4 inch load lock
SEM imaging while FIB milling (high current mode/high depth of field)
No magnetic field projected outside SEM column

SW:
Raith lithography system
AutoProbe (Omniprobe)

Contact Vince Luciani, vince.luciani-at-nist.gov
Access User Facility
Applications Cross-sectional imaging
TEM sample prep
Micro/nanomachining
Nanophotonic structure fabrication
National Institute of Standards and Technology
Material Measurement Laboratory (MML)
FEI Nova 600 NanoLab HW:
Sidewinder ion column (2 KV – 30 KV, 21 nA)
FEG SEM
Detectors: ETD, TLD, CDEM, STEM, retractable Backscatter Detector
GIS: Pt, C, SCE
Autoprobe 200
Klinediek Micromanipulator
Quorum Polaron Cryo system

SW:
AutoSlice&View
AutoTEM
AutoFIB
EBS3
EDS3

Analytical Tools:
Oxford INCA X-sight SDD (80mm2)
Oxford/HKL Channel5 EBSD

Contact Babak Nikoobakht (babak.nikoobakht-at-nist.gov)
Access Collaborators
Applications Biological room temp and cryogenic 3D imaging and analysis
Microanalysis
Nanowire research
Particle analysis
Materials science and geology
TEM sample prep
National Institute of Standards and Technology
Material Measurement Laboratory (MML)
FEI Helios 660 NanoLab

HW:
Tomahawk ion column (2 KV – 30 KV, 60 nA)
Elstar FEG SEM
Detectors: ETD, TLD, MD, ICD, SE/SID, STEM
GIS: Pt, C, SCE
Omniprobe
Quorum Polaron Cryo system
Gatan MonoCL4

SW:
AutoSlice&View
AutoTEM
AutoFIB
EBS3
EDS3
iFAST
MAPS


Analytical Tools:
EDAX TEAM Enhanced EDS System with Octane Plus SDD (30mm2)
EDAX TEAM Enhanced EBSD System with Hikari HNF

Contact Keana Scott (keana.scott-at-nist.gov)
Access Internal Use
Applications Biological room temp and cryogenic 3D imaging and analysis
Microanalysis
Particle analysis
National Institute of Standards and Technology
Physical Measurement Laboratory (PML)
FEI Helios 600 NanoLab HW:
Sidewinder ion column (4 nm resolution at 1 pA)
Helios FEG SEM (better than 1 nm resolution)
Detectors: ETD, TLD, STEM, STEM II
GIS: Pt
Quorum Polaron Cryo system
Laser interferometer stage
drift and vibration compensation
38 pm resolution

SW:

Auto Slice&View
AutoFIB

Analytical Tools:
Bruker XFlash SDD system

Contact Andras Vladar (andras.vladar-at-nist.gov)
Access Collaborators
Applications Metrology
National Institute of Standards and Technology
Physical Measurement Laboratory (PML)
Zeiss Orion HIM HW:
Helium Gas Field-Ion Source (GFIS, 10 kV - 30 KV, Sample bias (-500 to +500 volts)
Flood-gun sample charge compensation
Detectors: ETD, MCP (backscattered ion detector)
Omniprobe GIS: H20, XeF2 and TEOS
0.75 nm imaging resolution

SW:
ALS system UI with basic patterning system
Nabity Nanopattern Generator System (NPGS, http://www.jcnabity.com/)

Contact Kate Klein (kate.klein-at-nist.gov)
Andras Vladar (andras.vladar-at-nist.gov)
Access Internal Use and Collaborators
Applications Metrology, Imaging, Nanopatterning and Nanomachining
Naval Research Laoratory
Materials Science and Technology Division
FEI Nova 600 NanoLab HW:
Sidewinder ion column (2 KV – 30 KV, 21 nA)
Sirion FEG SEM
Detectors: ETD, TLD, Removable STEM
GIS: Pt, Selective Carbon Etch, Enhanced Etch, Carbon Dep
Raith E-beam/I-beam writer (Nanolithography tool)
Ascend Micromanipulator

SW:

HKL Suite
Auto Slice and View
Auto TEM
Alicona Stereo Imaging

Analytical Tools:
Oxford SDD
HKL EBSD/Forward Scatter Diode Detectors (ECCI)

Contact Nabil Bassim, 202-767-2007
Rhonda Stroud
Konrad Bussmann
Access Collaborators
Applications EBSD/EDS/Image Mapping/Reconstruction
TEM sample preparation
Nanowire research
Patterning/Device design
Defect analysis
ECCI imaging of dislocations/crystal defects
Penn State
Materials Research Institute, Materials Characterization Laboratory
FEI Quanta 200 3D HW:
Magnum ion column (5-7 nm resolution, 5–30 kV)
W SEM (3.5 nm resolution at 30 kV)
Quorum Polarprep Cryo Transfer System
GIS: W, Pt
Omniprobe

SW:

AutoTEM
Auto Slice&View
AutoFIB


Contact Trevor Clark, 814-865-8476, trevor-at-psu.edu
Access Shared-use facility; academic and industrial collaborations as well
Applications TEM sample preparation
Cryo-TEM specimen prep and cross sectioning
Rapid prototyping
Stevens Institute of Technology
Laboratory for Multiscale Imaging
Zeiss Auriga CrossBeam HW:
Cobra ion column (2.5 nm at 30 kV, probe current 1 pA to 50 nA)
Gemini FEG Column (1 nm at 15 kV & 1.9 nm at 1 kV)
Detectors: STEM, ETD, in-lens SE, in-lens EsB
Charge compensator
Leica VCT-100 cryo-transfer and MED20 freeze fracture/coating system
GIS: Pt
Kleindiek MM3A manipulator
NPGS E-beam amd I-beam lithography system

Analytical Tools:

Oxford INCA X-sight SDD (80mm2)

Contact Tseng-ming (Alex) Chou, tseng-ming.chou-at-stevens.edu
Access Shared-use facility; academic and industrial collaborations as well
Applications TEM sample preparation
EM Cryo techniques
Materials research
University of Maryland at College Park
Nanoscale Imaging, Spectroscopy, and Properties Laboratory
FEI FIB-620 DualBeam FIB/SEM HW:
Ion column (FEI 30 kV with Ga LMIS)
Electron column (Phillips XL-40 SFEG)
Detection: SED
GIS: FEI-Pt, FEI-XeF2, Kleindiek GIS-EM

Accessories:
Kleindiek MM3A-EM Manipulators
digital video recorder

Contact Valery Ray, vray-at-umd.edu
Website http://nanocenter.umd.edu/equipment - scroll down to NISP-05
Access Shared use, open to industrial and academic users
Applications Micromachining, Micropobing and Cross-sectioning
Virginia Tech
Nanoscale Characterization and Fabrication Laboratory (ICTAS/NCFL)
FEI Nova NanoLab 600 HW:
Sidewinder ion column (2 kV - 30 kV, ~20 nA)
FEG SEM
Detectors: ETD, TLD, CDEM, Retractable STEM
GIS: Pt, SCE, TEOS, IEE (XeF2)
Omniprobe Autoprobe 200
Quorum Polaron cryo transfer system
Evactron in situ plasma cleaning

SW:
FEI auto routines
Nabity Nanometer Pattern Generator System (NPGS, http://www.jcnabity.com/)
3D EBSD
Simultaneous EDS and EBSD acquisition

Analytical Tools:
EDAX TSL EBSD with FSD
EDAX SDD EDS detector with TEAM software

Contact Christopher Winkler, crwinkler-at-vt.edu
Jay Tuggle, jaysmail-at-vt.edu
Website http://www.ictas.vt.edu/ncfl/
Access User facility; Outside academic and industrial users welcome
Applications TEM sample preparation
Semiconductor device characterization, rewiring, failure analysis
Fabrication
Lithography
Cryo FIB