Inventory

Army Research Laoratory Aberdeen
FEI Nova NanoLab 600	HW: Sidewinder ion column (2 KV – 30 KV, 21 nA) Sirion FEG SEM Detectors: ETD, TLD, CDEM GIS: Pt Autoprobe 200 SW: Auto Slice&View AutoTEM AutoFIB Analytical Tools: Oxford Si-Li EDS Oxford/ HKL EBSD
Contact	Brian Schuster
Access	Collaborators and Gov’t organizations, US citizens only
Applications	semiconductor device + material characterization and failure analysis SEM cross-section and TEM sample prep Device modification of MEMS and electro-optic devices

Brookhaven National Laboratory Center for Functional Nanomaterials
FEI Helios NanoLab 600	HW: DualBeam (SEM/FIB) Detectors: ETD, TLD, STEM GIS: Pt, TEOS Omniprobe Evactron in-situ plasma cleaning SW: Nanometer Pattern Generator System (NPGS, http://www.jcnabity.com/) LabVIEW (for in-situ electrical measurements) Oxford Instruments INCA for microanalysis Analytical Tools: Oxford Instruments SiLi EDS Detector
Contact	Fernando Camino, fcamino-at-bnl.gov
Website	http://www.bnl.gov/cfn/groups/Nanofabrication/
Access	User facility (academic and industrial users welcomed)
Applications	SEM imaging while FIB milling, SEM cross-section and TEM sample preparation, Micro/nanofabrication, E-beam and ion beam lithography, In-situ electrical measurements, Electron beam induced current imaging, Microanalysis

Carnegie Institution of Washington Geophysical Laboratory
Zeiss Auriga CrossBeam	HW: Cobra FIB (<2.5nm resolution at 30 keV, Energy range 1 kV - 30 kV, Beam current 1 pA - 50 nA) Gemini FEG SEM (1.9 nm resolution at 1 kV) Detectors: SE2(ETD), in-lens, ESB, STEM Multi-GIS: Pt, C, H2O, XeF2, SiO2 Charge Compensator Autoprobe 200.2 SW: Zeiss SmartSEM Avizo 3D Analytical Tools: Oxford INCA X-sight SDD (80mm2)
Contact	Yingwei Fei, fei-at-gl.ciw.edu
Access	Collaborators
Applications	Primarily for applications in high-pressure research, earth and planetary sciences

Drexel University Centralized Research Facility
FEI DB235	HW: Sirion FEG SEM Detectors: SED, TLD, CDEM GIS: Pt Autoprobe 100 SW: FEI Auto Applications Analytical Tools: iXRF, EDS, XRF
Contact	Craig Johnson, cljohnson-at-coe.drexel.edu
Website	http://crf.coe.drexel.edu/
Access	Outside academic and industrial users welcome
Applications	characterization, fabrication, TEM sample prep

Johns Hopkins University MRSEC Facility
FEI Nova 600 NanoLab	HW: Magnum ion column (5-7 nm resolution, 5-30 kV) FEG SEM Detectors: ETD, TLD, CDEM GIS: Pt, TEOS OmniProbe (Analog system) SW: AutoSlice&View AutoTEM AutoFIB NPGS lithography (installed and tested, in optimizing)
Contact	Prof. C. L. Chien, clc-at-pha.jhu.edu Dr. Sunxiang Huang, sxhuang-at-pha.jhu.edu
Access	Outside users can access through collaboration with MESEC PI/students ($70/hr) Non-collaboration users can access it after approval ($210/hr)
Applications	TEM Sample Prep Nano-electronics and nano-biomaterial characterization Nano stencil mask fabrication

National Institutes of Health National Cancer Institute, Laboratory of Cell Biology
Zeiss NVision 40 CrossBeam	HW: Seiko Zeta FIB (4 nm resolution at 0.1 pA) Gemini FEG SEM (2.5 nm resolution at 1 KV) Detectors: SE2 (ETD), in-lens, ESB, STEM GIS: Pt, C SW: Zeiss SmartSEM ATLAS 3D
Contact	Sriram Subramaniam, subramas-at-mail.nih.gov
Access	Internal Use Only
Applications	Primarily for biological applications

National Institutes of Health NIAID IRF -Frederick
TBD
Contact
Access	Internal Use Only
Applications	Biological applications Nano characterization

National Institute of Standards and Technology Center for Nanoscale Science and Technology (CNST)
FEI Helios 650 NanoLab	HW: Tomahawk ion column (2 kV - 30 KV, 60 nA) Elstar FEG SEM Detectors: ETD, TLD, SE/ICE, STEM Deposition: Pt, C, SiO2(TEOS) Etching: H2O, XeF2 Omniprobe Autoprobe liftout tool SW: Amira AutoFIB (macro recorder) AutoProbe (Omniprobe) Auto Slice and View G3 Drift Correction AutoTEM G2 FEI Movie Creator INCA (Oxford EDS) Nano Builder Analytical Tool: EDS
Contact	Vince Luciani, vince.luciani-at-nist.gov
Access	User Facility
Applications	Cross-sectional imaging TEM sample prep Micro/nanomachining Nanophotonic structure fabrication

National Institute of Standards and Technology Center for Nanoscale Science and Technology (CNST)
FEI Helios 650 NanoLab	HW: Tomahawk ion column (2 kV - 30 KV, 60 nA) Elstar FEG SEM Detectors: ETD, TLD, SE/ICE, STEM Deposition: Pt, C, SiO2 Etching: H2O, XeF2 Omniprobe Autoprobe liftout tool Kleindiek Micromanipulator SW: Amira AutoFIB (macro recorder) AutoProbe (Omniprobe) Auto Slice and View G3 AutoTEM G2 Drift Correction FEI Movie Creator Kleindiek iProbe Nano Builder Analytical Tool: EDS
Contact	Vince Luciani, vince.luciani-at-nist.gov
Access	User Facility
Applications	Micro/nanomachining Nanophotonic structure fabrication

National Institute of Standards and Technology Center for Nanoscale Science and Technology (CNST)
Zeiss NVision 40 CrossBeam	HW: Seiko Zeta FIB (4 nm resolution at 0.1 pA) Gemini FEG SEM (2.5 nm resolution at 1 KV) STEM detector Deposition: Pt, C, SiO2 Etching: H2O, XeF2 Omniprobe Autoprobe liftout tool 4 inch load lock SEM imaging while FIB milling (high current mode/high depth of field) No magnetic field projected outside SEM column SW: Raith lithography system AutoProbe (Omniprobe)
Contact	Vince Luciani, vince.luciani-at-nist.gov
Access	User Facility
Applications	Cross-sectional imaging TEM sample prep Micro/nanomachining Nanophotonic structure fabrication

National Institute of Standards and Technology Material Measurement Laboratory (MML)
FEI Nova 600 NanoLab	HW: Sidewinder ion column (2 KV – 30 KV, 21 nA) FEG SEM Detectors: ETD, TLD, CDEM, STEM, retractable Backscatter Detector GIS: Pt, C, SCE Autoprobe 200 Klinediek Micromanipulator Quorum Polaron Cryo system SW: AutoSlice&View AutoTEM AutoFIB EBS3 EDS3 Analytical Tools: Oxford INCA X-sight SDD (80mm²) Oxford/HKL Channel5 EBSD
Contact	Babak Nikoobakht (babak.nikoobakht-at-nist.gov)
Access	Collaborators
Applications	Biological room temp and cryogenic 3D imaging and analysis Microanalysis Nanowire research Particle analysis Materials science and geology TEM sample prep

National Institute of Standards and Technology Material Measurement Laboratory (MML)
FEI Helios 650 NanoLab	HW: Tomahawk ion column (2 KV – 30 KV, 60 nA) Elstar FEG SEM Detectors: ETD, TLD, SE/SID, STEM GIS: Pt, Au, SCE Omniprobe Quorum Polaron Cryo system Gatan MonoCL4 SW: AutoSlice&View AutoTEM AutoFIB EBS3 EDS3 iFAST Analytical Tools: EDAX TEAM Enhanced EDS System with Octane Plus SDD (30mm²) EDAX TEAM Enhanced EBSD System with Hikari HNF
Contact	Keana Scott (keana.scott-at-nist.gov)
Access	Internal Use
Applications	Biological room temp and cryogenic 3D imaging and analysis Microanalysis Particle analysis

National Institute of Standards and Technology Physical Measurement Laboratory (PML)
FEI Helios 600 NanoLab	HW: Sidewinder ion column (4 nm resolution at 1 pA) Helios FEG SEM (better than 1 nm resolution) Detectors: ETD, TLD, STEM, STEM II GIS: Pt Quorum Polaron Cryo system Laser interferometer stage drift and vibration compensation 38 pm resolution SW: Auto Slice&View AutoFIB Analytical Tools: Bruker XFlash SDD system
Contact	Andras Vladar (andras.vladar-at-nist.gov)
Access	Collaborators
Applications	Metrology

National Institute of Standards and Technology Physical Measurement Laboratory (PML)
Zeiss Orion HIM	HW: Helium Gas Field-Ion Source (GFIS, 10 kV - 30 KV, <10 pA) Sample bias (-500 to +500 volts) Flood-gun sample charge compensation Detectors: ETD, MCP (backscattered ion detector) Omniprobe GIS: H20, XeF2 and TEOS 0.75 nm imaging resolution SW: ALS system UI with basic patterning system Nabity Nanopattern Generator System (NPGS, http://www.jcnabity.com/)
Contact	Kate Klein (kate.klein-at-nist.gov) Andras Vladar (andras.vladar-at-nist.gov)
Access	Internal Use and Collaborators
Applications	Metrology, Imaging, Nanopatterning and Nanomachining

Naval Research Laoratory Materials Science and Technology Division
FEI Nova 600 NanoLab	HW: Sidewinder ion column (2 KV – 30 KV, 21 nA) Sirion FEG SEM Detectors: ETD, TLD, Removable STEM GIS: Pt, Selective Carbon Etch, Enhanced Etch, Carbon Dep Raith E-beam/I-beam writer (Nanolithography tool) Ascend Micromanipulator SW: HKL Suite Auto Slice and View Auto TEM Alicona Stereo Imaging Analytical Tools: Oxford SDD HKL EBSD/Forward Scatter Diode Detectors (ECCI)
Contact	Nabil Bassim, 202-767-2007 Rhonda Stroud Konrad Bussmann
Access	Collaborators
Applications	EBSD/EDS/Image Mapping/Reconstruction TEM sample preparation Nanowire research Patterning/Device design Defect analysis ECCI imaging of dislocations/crystal defects

Penn State Materials Research Institute, Materials Characterization Laboratory
FEI Quanta 200 3D	HW: Magnum ion column (5-7 nm resolution, 5–30 kV) W SEM (3.5 nm resolution at 30 kV) Quorum Polarprep Cryo Transfer System GIS: W, Pt Omniprobe SW: AutoTEM Auto Slice&View AutoFIB
Contact	Trevor Clark, 814-865-8476, trevor-at-psu.edu
Access	Shared-use facility; academic and industrial collaborations as well
Applications	TEM sample preparation Cryo-TEM specimen prep and cross sectioning Rapid prototyping

Stevens Institute of Technology Laboratory for Multiscale Imaging
Zeiss Auriga CrossBeam	HW: Cobra ion column (2.5 nm at 30 kV, probe current 1 pA to 50 nA) Gemini FEG Column (1 nm at 15 kV & 1.9 nm at 1 kV) Detectors: STEM, ETD, in-lens SE, in-lens EsB Charge compensator Leica VCT-100 cryo-transfer and MED20 freeze fracture/coating system GIS: Pt Kleindiek MM3A manipulator NPGS E-beam amd I-beam lithography system Analytical Tools: Oxford INCA X-sight SDD (80mm2)
Contact	Tseng-ming (Alex) Chou, tseng-ming.chou-at-stevens.edu
Access	Shared-use facility; academic and industrial collaborations as well
Applications	TEM sample preparation EM Cryo techniques Materials research

University of Maryland Institute for Reseach in Electronics and Applied Physics
Micrion FIB-2500	Ion column (50 kV, 5nm)
FEI 620 DualBeam	Ion column (30 kV)
FAI NanoFab-150	150 kV linear accelerating column (~100nm) Arsenic-Palladium-Boron source
Contact
Access
Applications

Virginia Tech Nanoscale Characterization and Fabrication Laboratory (ICTAS/NCFL)
FEI Nova NanoLab 600	HW: Sidewinder ion column (2 kV - 30 kV, ~20 nA) FEG SEM Detectors: ETD, TLD, CDEM, Retractable STEM GIS: Pt, SCE, TEOS, IEE (XeF2) Omniprobe Autoprobe 200 Quorum Polaron cryo transfer system Evactron in situ plasma cleaning SW: FEI auto routines Nabity Nanometer Pattern Generator System (NPGS, http://www.jcnabity.com/) 3D EBSD Simultaneous EDS and EBSD acquisition Analytical Tools: EDAX TSL EBSD with FSD EDAX SiLi EDS Detector
Contact	Christopher Winkler, crwinkler-at-vt.edu Jay Tuggle, jaysmail-at-vt.edu
Website	http://www.ictas.vt.edu/ncfl/
Access	User facility; Outside academic and industrial users welcome
Applications	TEM sample preparation Semiconductor device characterization, rewiring, failure analysis Fabrication Lithography Cryo FIB